PRODUCT

Universal 8"/12" Dual-Size Cassette AMR (4-Slot)

Designed specifically for the rigorous demands of semiconductor fabrication, this hybrid AMR delivers core value through exceptional compatibility and seamless automation integration. Its key features include: Mixed-Line Production Compatibility This system supports the concurrent handling of both 12-inch (FOUP) and 8-inch (Cassette/SMIF) wafer pods. It allows for the transport of different carrier specifications without the need for chassis hardware changes. Multi-Slot Operational Efficiency Configured with 4 specialized slots, the AMR can perform multi-point deliveries or batch loading/unloading in a single mission. This significantly reduces idle travel time and optimizes fleet throughput. Vision-Guided Collaborative Handling The unit is equipped with a top-mounted vision-guided collaborative robot arm, enabling it to precisely identify and interface with various types of equipment Load Ports across different heights and configurations. Autonomous Trackless Navigation Utilizing advanced AMR technology, the vehicle navigates flexibly to avoid obstacles and adapts to dynamic logistics routes within the cleanroom. It is a critical piece of infrastructure for achieving flexible, mixed-line production in Smart Factories.