PRODUCT

4-Slot 8-inch Open-CST De-Lidding AMR

Specifically designed for 8-inch wafer fabrication facilities, this intelligent transport vehicle bridges the gap between legacy processes and modern automation. Its key features include: Automated Decapping Functionality In addition to accommodating four 8-inch open-cassette slots, the vehicle features an integrated automated decapping mechanism. This allows it to handle cassette covers during transport or while interfacing with equipment, ensuring wafers remain protected until the moment of transfer. Vision-Guided Collaboration Equipped with a TM collaborative robot arm, the system utilizes built-in vision sensors to precisely locate and orient cassettes. This ensures high-reliability loading and unloading operations, even in dynamic environments. Optimized Cleanroom Operations Tailored for the automation upgrade of legacy 8-inch fabs, this solution significantly reduces direct human contact with wafers. This minimizes contamination risks and substantially improves particle protection standards. Flexible Field Adaptation Built on an AMR (Autonomous Mobile Robot) chassis, the vehicle utilizes autonomous navigation to maneuver through the narrow aisles typical of 8-inch facilities. It can be deployed rapidly without requiring modifications to the existing cleanroom infrastructure, achieving full automation of material flow.